nenion - Precision Vacuum Technology

Threway function

The steppermotor driven valve allows the automation of the gasdosing process. By menas of the steppermotor driven UHV Gasdosing Valve closed loop control of gas flow or pressure in all vacuum areas from low, fine and high to ultrahigh vacuum is possible. You may also: Connect a snesor (flow, pressure) to it and control your process as a closed loop. Control the valve manually via touch input. The resolution per stroke is very high: 1,000,000 steps. The valve has an encoder, so the process is monitored. There is also a visual indication of the valve position. The products ships with Controler, mains cable, USB-connections cable and 5m Motor cable.

The manual actuator provides the possibility to adjust the gasflow with a handwheel. The stroke from open to close position is divided into ten turns of the handwheel. The axial stroke is 10mm, the maximum closing torque is 5 Nm. The handwheel is made of pretected steel. It can be dismantled during baking out. Idealized measurement protocol: The handwheel is kept stable for one minute after every turn. The reaction is fast and the throughput is stable. Durinf the first 3 turns following the open position the diaphragm does not touch the valves seat. When usind the valve at 20°C control in the range between 10-9 and 10-10 mbarl/s is ot possible due to physical restrictions (red area in the diagram). The valve is then tight aufter the 9th turn. Control in this area needs heating. The maximum throughput is 60 mbar*l/s. Actual measurement protocol: Different leakrates (=throughput) are being appraoched and held for 20 seconds.

The manual actuator provides the possibility to adjust the gasflow by a habdwheel. The stroke from open to close position is divided into ten turns of the handwheel. the axial stroke is 10mm, the maximum closing torque is 5 Nm. The handwheel is made of pretected steel. It can be dismantled during baking out.