Manual DriveCF-16 side and CF-35 bottom
UHV-Leakvalve Manually Operated CF-16 and CF-35
The manual actuator provides the possibility to adjust the gasflow by a handwheel. The stroke from open to close position is divided into ten turns of the handwheel. The handwheel is made of pretected steel. It can be dismantled during baking out.
Key Features
- CF-16 on the side and CF-35 on the bottom
- Bakeable up to 300°C (fully operable)
- Manually operated
- Vernier for exact reading of valve position
Technical Specifications
| General | |
| Material Housing | 1.4404 (316L) |
| Werkstoff Membrane (Dichtung) | 1.4435 (316L) vergoldet |
| Werkstoffe ausserhalb des Mediums | 1.4301, korrosionsgeschützter Stahl (304) |
| Einbaulage | beliebig |
| Innendruck | Vakuum bis 10 bar |
| Druckdifferenz am Ventilsitz | 10 bar von beliebiger Seite |
| Dichtheit Gehäuse | 1*10 -10 mbar.l/s |
| Dichtheit Ventilsitz | 1*10 -10 mbar.l/s |
| Gewicht | 2,2 kg |
| Hub: Anzahl Umdrehungen Handrad | 10 |
| max. Drehmoment | 5 Nm |
| Totvolumen | |
| Hauptflanschseite | 1,4 cm 3 |
| Seitenflansch | 4.6 cm 3 |
| Ausheiztemperaturen | |
| Ventil Gehäuse | 300°C |
| Ventil Antrieb | 270°C |
Downloads & Documentation
Gas Dosing Properties - Closing and Opening
- Idealized measurement protocol: Teh handwheel is kept stable for one minute after every turn. The reaction is fast and the throughput is stable.
- Durinf the first 3 turns following the open position the diaphragm does not touch the valves seat.
- When usind the valve at 20°C control in the range between 10-9 and 10-10 mbarl/s is ot possible due to physical restrictions (red area in the diagram). The valve is then tight aufter the 9th turn. Control in this area needs heating.
- The maximum throughput is 60 mbar*l/s.
Gas Dosing Properties - Setpoints
- Actual measurement protocol: Different leakrates (=throughput) are being appraoched and held for 20 seconds.
Technical Support
Phone Support
+49 (0) 123 456 789
Email Support
support@nenion.com
Address
nenion Dornbirn, Austria
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