Manual DriveCF-35 at the bottom and CF-16 on the side.
UHV-Leakvalve Automatic CF-16 and CF-35
The steppermotor driven valve allows the automation of the gasdosing process. By means of the steppermotor driven UHV Gasdosing Valve closed loop control of gas flow or pressure in all vacuum areas from low, fine and high to ultrahigh vacuum is possible.
Key Features
- CF-35 flange at the bottom and CF-16 on the side
- Bakeable up to 300°C (Motor can stay on the valve, but must not be heated)
- Metallic seal gold-plated
- Stepper motor driven with controller
- Visual position indicator
- Step Resolution 1.000.000 with encoder feedback
- Analog-Input (0-10V): Remote sensors (pressure, flow) for closed loop control. Remote sensors are not included.
- Digital-Input (USB, Ethernet, Modbus): Via Remote Computer
- Software-Updates via Network (Ethernet) or USB.
Technical Specifications
| Technical Specifications | |
| Material Housing | 1.4404 (316L) |
| Material Sealing | 1.4435 (316L) gold plated |
| Material not in contact with gas | 1.4301 (304) |
| Mounting Position | any |
| Internal Pressure | Vacuum to 10 bar |
| Inlet Pressure | 10 bar from each side |
| Tightness Housing | 1*10 -10 mbar.l/s |
| Tightness Valve Seat | 1*10 -10 mbar.l/s |
| Flow rate | 10-9 mbar*l/s to 60 mbar*l/s (even lower when baking out) |
| Power Supply | 230 VAC or 24 VDC |
| Volumes | |
| Main Flange | 1.0 cm 3 |
| Side Flange | 4.6 cm 3 |
| Weight | 4.4 kg |
| Bakeout Temperature | |
| Valve Housing | 300°C |
| Valve Actuator | 270°C |
| Actuator | |
| Time to travelk across stroke | 14 seconds |
| Steps / Stroke | 1,000,000 |
| Interfaces | USB, Ethernet, Modbus, Analog |
| Input | Touchscreen |
| Operational Modes | Manual, Closed Loop Control, Script Commands |
Gas Dosing Properties
Closing And Opening
- Idealized measurement protocol: The valve is closed from position 1,000,000 to position 0 and then opened again. The red curve is the closing curve and green is the open curve.
- The first 300,000 steps the diaphragm does not touch the valve seat.
- When used in room temperature control between 10-9 and 10-10 is not possible due to physical restrictions (red area in diagram). However, it is possible when heating the valve body.
- Maximum throughput is 60 mbar.l/s.
Automatically set different leakrates
Actual measurement protocol: Different leakrates (flow, throughput) are being automatically set and held for 20 seconds.
Downloads & Documentation
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